Abstract
The microlens has found wide applications of emitters and detectors in fiber optical communication. Several feasible fabrication methods of a microlens have been reported, namely volume change of a substrate, volume growth in PMMA, photoresist reflow method and dipping method. The common concerns are the long processing time and reliability in volume manufacturing. The current study presents an innovative process utilizing a composite layer to achieve fast and neat fabrication of micro-balls in array.
Cite
CITATION STYLE
Hocheng, H., Pan, C. T., & Cheng, C. C. (2002). Formation of micro-lens by reflow of dual photoresist. In 2002 International Microprocesses and Nanotechnology Conference, MNC 2002 (pp. 198–199). Institute of Electrical and Electronics Engineers Inc. https://doi.org/10.1109/IMNC.2002.1178612
Register to see more suggestions
Mendeley helps you to discover research relevant for your work.
