Integrated Electro-Optics Modulator

Abstract

An E / O phase modulator may include a waveguide having an insulating substrate , a single - crystal silicon strip and a polysilicon strip of a same thickness and doped with oppo site conductivity types above the insulating substrate , and an insulating interface layer between the single - crystal silicon strip and polysilicon strip . Each of the single - crystal silicon strip and polysilicon strip may be laterally continued by a respective extension , and a respective electrical contact coupled to each extension .