Pulse-on-Demand Operation for Precise High-Speed UV Laser Microstructuring

Abstract

Laser microstructuring has been studied extensively in the last decades due to its versatile, contactless processing and outstanding precision and structure quality on a wide range of materials. A limitation of the approach has been identified in the utilization of high average laser powers, with scanner movement fundamentally limited by laws of inertia. In this work, we apply a nanosecond UV laser working in an intrinsic pulse-on-demand mode, ensuring maximal utilization of the fastest commercially available galvanometric scanners at scanning speeds from 0 to 20 m/s. The effects of high-frequency pulse-on-demand operation were analyzed in terms of processing speeds, ablation efficiency, resulting surface quality, repeatability, and precision of the approach. Additionally, laser pulse duration was varied in single-digit nanosecond pulse durations and applied to high throughput microstructuring. We studied the effects of scanning speed on pulse-on-demand operation, single- and multipass laser percussion drilling performance, surface structuring of sensitive materials, and ablation efficiency for pulse durations in the range of 1–4 ns. We confirmed the pulse-on-demand operation suitability for microstructuring for a range of frequencies from below 1 kHz to 1.0 MHz with 5 ns timing precision and identified the scanners as the limiting factor even at full utilization. The ablation efficiency was improved with longer pulse durations, but structure quality degraded.