Local structure of zinc-indium-tin oxide films via grazing-incidence x-ray pair-distribution functions and theoretical methods

Abstract

A detailed experimental and theoretical study on the local (r ≤ 4.5 Å) atomic structure of amorphous and crystalline zinc-indium-tin oxide (ZITO) thin films using grazing-incidence x-ray Pair-Distribution Functions (PDFs), ab initio Molecular Dynamics (MD), and Empirical Potential Structure Refinement (EPSR) Monte Carlo simulations is presented. High-energy synchrotron x rays, a two-dimensional detector, and different incident angles were used to probe the depth uniformity of five (ZnO)0.15 (In2O3)0.70 (SnO2)0.15 films that were deposited via pulsed-laser deposition at growth temperatures (TG) ranging from 25 to 300 °C. Films deposited at TG ≤ 150 °C were amorphous. The partially crystalline (TG = 200 °C) and fully crystalline (TG = 300 °C) films were highly textured. Both crystalline and amorphous structures were investigated using ab initio MD and EPSR Monte Carlo simulations. The density of the amorphous films determined from the experimental data agreed with MD calculations. Coordination numbers, bond lengths, and distortion for metal-oxygen and for both the edge- and corner-shared In-metal shells up to 4.5 Å obtained from PDF analysis closely agreed with MD and EPSR simulations. There is a pronounced decrease in the edge- and corner-shared In-Zn distances arising from the shorter Zn-O bond length, Zn-O tetrahedral coordination, and In-O-Zn angle in amorphous ZITO compared to its crystalline counterpart. A maximum in electrical mobility was observed for the amorphous film just before crystallization occurred. While the peak is broad, consistent with nearly unchanged overall cation-oxygen coordination in the amorphous films, ESPR results indicate that the tetrahedral coordination follows the conductivity trend.