Cu2O/ZnO heterojunction solar cells fabricated by magnetron-sputter deposition method films using sintered ceramics targets

Abstract

Cu2O/ZnO heterojucntion solar cells were successfully obtained by a magnetron-sputter deposition method. The Cu2O thin film was deposited by the method using a sintered Cu2O ceramics target. Crystalline phases of the films were controlled by adjusting an O2 flow rate ratio (O2/(Ar+O2)) precisely during the sputtering process and Cu2O single phase polycrystalline films were obtained at room temperature. The Cu2O films qualities were improved by a rapid thermal annealing for 30 s in an Ar atmosphere of 1 atm. Hall mobility, carrier density, and resistivity of annealed films reached the values of 16.6 cm2/V/s, 3.5×1015 cm-3, and 107 Ωcm at 600°C, respectively. The conversion efficiency of the Cu 2O/ZnO heterojucntion solar cell was 0.24 % with the open circuit voltage of 0.69 V.