Tailoring the ultra-soft magnetic properties of sputtered FineMET thin films for high-frequency power applications

Abstract

This paper presents sputtered FineMET thin films with high saturation magnetic flux density and ultra-soft magnetic properties by maintaining an in-plane magnetization reversal process. The magnetic properties of FineMET thin films were investigated as a function of film thickness (40-517 nm) and annealing temperature (200-400 °C). The hysteresis loop study reveals that the films with low thickness (40 -316 nm) were perpendicularly magnetized in the as-deposited state. The ultra-soft magnetic properties (Hc =3 A/m) of the films were tailored by a thermal annealing process. A high relative permeability (μr ) of 1763 of these films with a good loss performance up to 1 GHz, makes them attractive for high-frequency power applications.