Kinoform and saw-tooth X-ray refractive lenses development at SSRF

Abstract

Here we describe the effort made at Shanghai Synchrotron Radiation Facility (SSRF) to develop X-ray refractive lenses for real beamline applications. Fabrication process of silicon and germanium based kinoform lenses are optimized to increase the height-width aspect ratio and decrease the roughness. Saw-tooth lenses made with a new fabrication process based on dry etching are also described. Focusing effect for both kinoform and saw-tooth lenses are tested at Shanghai Synchrotron.