Characterization of CVD graphene permittivity and conductivity in micro-/millimeter wave frequency range

Abstract

The permittivity and conductivity of chemical vapor deposited monolayer graphene are investigated up to 40 GHz. The characterization method is based on a coplanar waveguide transmission line structure that is fabricated on a multilayer substrate of Si/SiO2/graphene/Al2O3 from the bottom up. The effective relative permittivity of the coplanar waveguide transmission line is extracted using Thru-Reflect-Line calibration and scattering parameter measurements, and then the relative permittivity and corresponding conductivity of graphene are characterized using partial capacitance techniques. The results demonstrate that the conductivity and sheet resistance are remarkably frequency-dependent and that the complex relative permittivity is consistent with the Drude model.