Digital holographic shape measurement using Fizeau microscopy

Abstract

© 2015 Chinese Optics Letters.We present a Fizeau interferometer using a microscopic objective as a tool for surface contouring without the need for a numerical lens for reconstruction. The interferometer is associated with a telescope system to feature the object with collimated light. The experiment is conducted on two objects possessing different step heights. The phase maps from the captured off-axis holograms are calculated numerically, which allows us to deduce the contours of the objects. The great advantages of the presented technique are that it can be done in real time and there is no need for numerical lenses for micro-objects reconstruction.