Tomographic reconstruction of an integrated circuit interconnect

Abstract

An Al-W-silica integrated circuit interconnect sample was thinned to several μm and scanned across a 200 nm focal spot of a Fresnel zone plate operating at photon energy of 1573 eV. The experiment was performed on beamline 2-ID-B of the Advanced Photon Source, a third-generation synchrotron facility. Thirteen scanned projections of the sample were acquired over the angular range ±69.2°. At least 301×301 pixels were acquired at each angle with a step size of 77×57 nm. A three-dimensional image with an approximate uncertainty of 400 nm was reconstructed from projection data using a standard algorithm. The two layers of the integrated circuit and the presence of the focused ion beam markers on the surface of the sample are clearly shown in the reconstruction. © 1999 American Institute of Physics.