Review Article: Recommended practice for calibrating vacuum gauges of the ionization type

Abstract

This article represents a recommended practice for the calibration of ionization gauges usig the comparison method. In this method, ionization gauges are compared to a working standard that has a système international, or the international system of units traceable calibration. The ionization gauge is either of the hot-cathode ionization type or the cold-cathode ionization type. Details of the calibration apparatus, the principle of operation of the gauges, data analysis, uncertainty budget, and reporting the uncertainty are given.