Journal ArticleOPEN ACCESS

Errata: RZLINE code modeling of distributed tin targets for laser-produced plasma sources of extreme ultraviolet radiation

  • Koshelev K
  • Ivanov V
  • Novikov V
  • et al.
Journal of Micro/Nanolithography, MEMS, and MOEMS (2012) 11(2) 029802-1
DOI: 10.1117/1.jmm.11.2.029802
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Abstract

This article [J. Micro/Nanolith. MEMS MOEMS. , 11, , 021112 (2012)] was originally published online on 21 May 2012 with four errors. The phrase “return-to-zero line” should have been “RZLINE” in the title, abstract, keywords, and introduction. The paper was corrected on 4 June 2012 and appears correctly in print.

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APA

Koshelev, K. N., Ivanov, V. V., Novikov, V. G., Medvedev, V., Grushin, A. S., & Krivtsun, V. M. (2012). Errata: RZLINE code modeling of distributed tin targets for laser-produced plasma sources of extreme ultraviolet radiation. Journal of Micro/Nanolithography, MEMS, and MOEMS, 11(2), 029802–1. https://doi.org/10.1117/1.jmm.11.2.029802

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