Determination of thin film refractive index and thickness by means of film phase thickness

Abstract

A new approach for determination of refractive index dispersion n (λ) (the real part of the complex refractive index) and thickness d of thin films of negligible absorption and weak dispersion is proposed. The calculation procedure is based on determination of the phase thickness of the film in the spectral region of measured transmittance data. All points of measured spectra are included in the calculations. Barium titanate thin films are investigated in the spectral region 0.38-0.78 μm and their n (λ) and d are calculated. The approach is validated using Swanepoel's method and it is found to be applicable for relatively thin films when measured transmittance spectra have one minimum and one maximum only. © Versita Warsaw and Springer-Verlag Berlin Heidelberg 2008.