Development of an optical inspection platform for surface defect detection in touch panel glass

Abstract

An optical inspection platform combining parallel image processing with high resolution opto-mechanical module was developed for defect inspection of touch panel glass. Dark field images were acquired using a 12288-pixel line CCD camera with 3.5 µm per pixel resolution and 12 kHz line rate. Key features of the glass surface were analyzed by parallel image processing on combined CPU and GPU platforms. Defect inspection of touch panel glass, which provided 386 megapixel image data per sample, was completed in roughly 5 seconds. High detection rate of surface scratches on the touch panel glass was realized with minimum defects size of about 10 µm after inspection. The implementation of a custom illumination source significantly improved the scattering efficiency on the surface, therefore enhancing the contrast in the acquired images and overall performance of the inspection system.