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Quartz‐Based Cantilevers: Soft‐Chemistry‐Assisted On‐Chip Integration of Nanostructured α‐Quartz Microelectromechanical System (Adv. Mater. Technol. 3/2021)

  • Jolly C
  • Gomez A
  • Sánchez‐Fuentes D
  • et al.
Advanced Materials Technologies (2021) 6(3)
DOI: 10.1002/admt.202170014
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Jolly, C., Gomez, A., Sánchez‐Fuentes, D., Cakiroglu, D., Rathar, R., Maurin, N., … Carretero‐Genevrier, A. (2021). Quartz‐Based Cantilevers: Soft‐Chemistry‐Assisted On‐Chip Integration of Nanostructured α‐Quartz Microelectromechanical System (Adv. Mater. Technol. 3/2021). Advanced Materials Technologies, 6(3). https://doi.org/10.1002/admt.202170014

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