Effect of time delay on laser-triggered discharge plasma for a beyond EUV source

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Abstract

We demonstrate the beyond extreme ultraviolet (BEUV) emission by a laser-triggered discharge source with the laser-current delay between 0.6 μs and 3 μs. The spectra at different electron temperatures are simulated theoretically, and the spectra at different laser-current delays are measured experimentally. The theoretical and experimental results show that the lower vapor velocity at longer laser-current delay time is beneficial for increasing the steady-state time of plasma at high temperature, thereby increasing the output intensity and spectral purity of 6.76 nm. The radiation intensity of 6.76 nm (0.6% bandwidth) increases about 240% when the delay increases from 0.6 to 3 μs.

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Xu, Q., Tian, H., Zhao, Y., & Wang, Q. (2019). Effect of time delay on laser-triggered discharge plasma for a beyond EUV source. Symmetry, 11(5). https://doi.org/10.3390/sym11050658

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