Abstract
An empirical dielectric function (EDF) is proposed for optical characterization of amorphous materials. The EDF consists of the sum of damped harmonic oscillator terms whose square root amplitudes are distributed according to a hyperbolic function of photon energy connected to an exponential function. The usefulness of EDF is demonstrated by fitting it to the table values of dielectric constants for a-Si and a-Si3N4 and by applying it to the spectro-ellipsometric analysis of a-Si films deposited by vacuum evaporation and rf glow discharge methods. © 1995 American Institute of Physics.
Cite
CITATION STYLE
Yamaguchi, T., Kaneko, Y., Jayatissa, A. H., Aoyama, M., Zotov, A. V., & Lifshits, V. G. (1995). Empirical dielectric function of amorphous materials for spectroscopic ellipsometry. Journal of Applied Physics, 77(9), 4673–4676. https://doi.org/10.1063/1.359604
Register to see more suggestions
Mendeley helps you to discover research relevant for your work.
