Electrochromic iridium oxide films prepared by reactive sputtering

Abstract

We report the preparation and electrochromic properties of iridium oxide films deposited by reactively sputtering iridium in a humidified oxygen discharge. These sputtered iridium oxide films (SIROFs) have the fast coloring and bleaching kinetics and excellent stability previously observed for anodically grown iridium oxide films (AIROFs). SIROFs deposited on SnO 2-coated glass can be modulated from clear to blue-gray with properties similar to those of AIROFs. In addition, SIROFs deposited on metal substrates exhibit a variety of colors which can be electrically altered. This adds a new dimension to the range of potential applications for iridium oxide displays.