Antireflection properties of multi-crystalline black silicon with acid textured surfaces using two step metal assisted chemical etching

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Abstract

We have fabricated multicrystalline black silicon (B-Si) with two step texturing process, first using micro-scale conventional acid texturing and second using nano-textured (nT-Si) layer, directly on the micro textured surface. Instead of Lithography process, a two step silver assisted chemical etching process, is used to fabricate nano-texture surfaces in the aqueous solution of hydrogen peroxide (H2O2) and hydrofluoric acid (HF) at room temperature. The reflectivity has been investigated with the varying time of the nano-texturization. The surface morphology of nano-textured black Si was studied by SEM and the optical properties were studied by spectrophotometer. The average reflectivity has decreased to 4.3 % in wavelength range from 300 to 800 nm.

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Sharma, V., Verma, A., Jain, V. K., & Verma, D. (2017). Antireflection properties of multi-crystalline black silicon with acid textured surfaces using two step metal assisted chemical etching. In Springer Proceedings in Physics (Vol. 178, pp. 23–28). Springer Science and Business Media, LLC. https://doi.org/10.1007/978-3-319-29096-6_3

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