Influence of the metal film of micro-cantilever fabricated by photolithographical technique on the mechanical resonant frequency

Kuroe, A., Murata, A., Muramatsu, S., Yokoyama, K., & Kusumoto, O. (1997). Influence of the metal film of micro-cantilever fabricated by photolithographical technique on the mechanical resonant frequency. Kyokai Joho Imeji Zasshi/Journal of the Institute of Image Information and Television Engineers, 51(5), 733–736. https://doi.org/10.3169/itej.51.733