RF MEMs for high-frequency applications

Abstract

RF MEMS has been identified as an area, which has the potential to provide a major impact on existing system architectures in sensors and communications by reducing weight, cost, size, and power dissipation by a few orders of magnitude. Key MEMS devices for current RF architectures are switches in radar systems and filters in communication systems. This paper discusses a new family of MEMS switches and Si-micromachined circuits appropriate for use in modern communications systems.