The development of love wave-based humidity sensors incorporating multiple layers

Abstract

A Love wave humidity sensor is developed by using a multilayer structure consisting of PVA/SiO 2 layers on an ST-90°X quartz substrate. The theoretical result shows that the sensor with such a two-layer structure can achieve a higher sensitivity and a smaller loss than the structures with a single polymer layer. Comparative experiments are performed for the sensor incorporating PVA/SiO 2 layers and the sensor incorporating a PVA layer. The experimental results agree well with the theoretical predication.