Abstract
In the past we have demonstrated that the use of an energy filtered scanning electron microscope (SEM) can enhance SEM dopant contrast. Here we have concentrated on a technique based on energy filtering in the SEM that allows the delineation of p-n junctions. © 2010 IOP Publishing Ltd.
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CITATION STYLE
APA
Rodenburg, C., Jepson, E., Inkson, J., Bosch, E., Chee, W., & Humphreys, J. (2010). Energy filtered scanning electron microscopy: Applications to dopant contrast. In Journal of Physics: Conference Series (Vol. 209). Institute of Physics Publishing. https://doi.org/10.1088/1742-6596/209/1/012053
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