MEMS-based Sensing Technology for the Gas Chromatograph Analysis

Abstract

Device miniaturization based on MEMS technology is an important research direction in the field of MEMS. The gas chromatograph is a commonly used instrument for detecting complex gases, but due to its large size, high power consumption, and heavyweight, it is not convenient and cannot meet people's needs for real-time, online, and rapid access to information. Therefore, the miniaturization of gas chromatographs combined with MEMS technology is a research trend. This paper first introduces the basic structure of the gas chromatograph. Then it studies the miniaturization of columns, detector miniaturization, and flow meter miniaturization based on MEMS technology, combined with cross-micro-nano scale integration technology to further improve sensitivity, and summarizes the prospects.