Fabrication of PEDOT:PSS/ZnMgO Schottky-type ultraviolet sensors on glass substrates with solution-based mist deposition technique and hard-mask patterning

Abstract

A transparent conducting polymer, poly(3,4-ethylenedioxythiophene) poly(styrenesulfonate) (PEDOT:PSS) thin films were fabricated by a novel ultrasonic spray-assisted mist deposition technique. The films of ZnMgO and high conductive ZnO:Ga were also formed by the same technique, with which high performance PEDOT:PSS/ZnMgO Schottky ultraviolet sensors were fabricated on glass substrates. Hard-mask patterning was employed, without photolithography. As an example, a sensor operating in the UV-B region exhibited the quantum efficiency of 0.37 at 250 nm and the ultraviolet/visible rejection ratio of about 103 under zero-bias condition. © 2011 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.