New method of calculating the correction factors for the measurement of sheet resistivity of a square sample with a square four-point probe

Abstract

The finite element method was employed to calculate the correction factors for the measurement of sheet resistivity of a square sample with a square four-point probe. This method is simpler than methods of image and conformal transformation, and can be used for calculating the correction factors for four-point resistivity measurement of an arbitrarily shaped sample with an arbitrary four-probe array. © 1997 American Institute of Physics.