Surface analysis using high-resolution rutherford backscattering spectroscopy

Abstract

Rutherford backscattering spectroscopy (RBS) is one of the widely used surface analysis techniques for the measurement of composition depth profiles. It allows quantitative and non-destructive analysis with a depth resolution of ∼10 nm. Using He ions of several hundred keV as a probe beam and a magnetic spectrometer for the energy analysis of scattered ions, the depth resolution can be improved to sub-nm region in RBS. This technique, called high-resolution RBS (HRBS), is an excellent technique for the analysis of ultra-thin films as well as surface and interface structures. After a brief description of the fundamentals of HRBS, some examples of the application of HRBS are presented, which includes analysis of high-k gate stack structures, the surface structure of an ionic liquid, trimethylpropylammonium bis (trifluoromethanesulfonyl) imide, and the combination analysis of HRBS and angle-resolved X-ray photoelectron spectroscopy.