On the accuracy of the probe-sample contact stiffness measured by an atomic force microscope

Abstract

To improve the accuracy of atomic force microscopy in nanomechanical experiments, an analytical model is proposed to study the static interaction of a cantilever in contact with a sample. The model takes into account: the cantilever probe is clamped by the sample or slides along its surface, the geometric and mechanical characteristics of the sample and the cantilever, their relative orientation. The cantilever console bending and torsion angles as functions of the sample displacements in three orthogonal directions have been measured by atomic force microscopy with an optical beam deflection scheme.The measurements are in good agreement with the simulation.