Time resolved spectroscopy

Abstract

The sheath dynamics of a 13.56 MHz capacitively driven hydrogen discharge is studied. Time resolved light emission measurements are obtained by imaging a vertical 30 mm wide strip of the central plasma onto an Oriel Instruments Instaspec V fast-gated integrating charge coupled device (ICCD). The time variation of the light emission is measured over two rf cycles at 2 ns intervals. The emission measurements are supplemented by measurements of the time resolved plasma current and electrode voltage, the time averaged dc plasma potential and the ac component of the plasma potential. A reference output from the rf matching unit is used to trigger and synchronize all the time-resolved measurements.