Combinatorial thin film synthesis and its high throughput screening for inorganic functional materials

Abstract

Combinatorial approach toward discovery of new functional materials and properties is a powerful method in fields of material science, because such approach can considerably decrease the time consumption for the discovery. Here, we focus on the combinaotorial approach to inorganic functional materials such as oxides, and review various studies on combinatorial thin film synthesis and high throughput screening techniques of structural, electric, magnetic, and optical properties.