An empirical energy loss equation of electrons

Abstract

A modified Love-Cox-Scott (1978) equation of electron energy loss has been suggested. The stopping powers predicted by the modified Love-Cox-Scott equation are compared with those by the Tung et al. (1979) model, the Joy and Luo (1989) equation, and the experimental data given in database of Joy at: http://web.ukt.edu/~scrutk. In the energy range of E0≤5 keV, the Monte Carlo simulations of the electron scattering in Al, Ag, and Au have been performed, applying the Mott cross section for elastic scattering and the modified Love-Cox-Scott equation (1978) and the equations by Love et al. (1978) and Joy and Luo (1989), respectively, for the inelastic scattering. The calculated results on the backscattering coefficients, the energy distributions of the backscattered electrons, and the energy dissipation of the electron based on the three equations are compared.