The Dry Etching Characteristics of HfAlO 3 Thin Films in CF 4 /Cl 2 /Ar Inductively Coupled Plasma

Abstract

In this study, the etching characteristics of HfAlO 3 thin film were investigated by varying the etch parameters such as the gas mixing ratio, the radio frequency power, the direct current bias voltage, and the process pressure in an inductively coupled plasma. The maximum etch rate of HfAlO 3 thin film and the selectivity of HfAlO 3 to SiO 2 were 20.55 nmmin and 0.38 in the CF 4Cl 2Ar (2:6:14 sccm) plasma, respectively. The plasma was analyzed by using optical emission spectroscopy. The chemical states on the surfaces of the etched HfAlO 3 thin film were investigated with X-ray photoelectron spectroscopy. The etching of HfAlO 3 thin films is performed by the interaction of Hf and Al atoms with the Cl and F radical in the CF 4Cl 2Ar plasma. However, their byproducts were remained at the surface because Hf-F and Al-F were non-volatile. Therefore, the plasma etching of the HfAlO 3 films follows the ion assisted chemical reaction. © 2011 The Electrochemical Society.