Abstract
RF MEMS tuners with wide impedance coverage have been developed for 6-24 GHz noise parameter and load-pull measurement systems. The tuners are based on triple-, double-, and single-stub topologies loaded with switched MEMS capacitors. Several designs are presented, and they use 10-13 switched MEMS capacitors to produce 1024-8192 (210-213) different impedances. The measured impedance coverage agrees well with simulations and it is the widest ever measured impedance coverage from any planar tuner to-date. © 2007 Wiley Periodicals, Inc.
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CITATION STYLE
Vähä-Heikkilä, T., Van Caekenberghe, K., Varis, J., Tuovinen, J., & Rebeiz, G. M. (2007). RF MEMS impedance tuners for 6-24 GHz applications. International Journal of RF and Microwave Computer-Aided Engineering, 17(3), 265–278. https://doi.org/10.1002/mmce.20220
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