Microfabricated bulk pzt piezoelectric disk transformers

Abstract

A new class of miniature monolithic piezoelectric transformer that leverages a simple two-mask bulk piezoelectric microfabrication process is presented. A millimeter-scale transformer design based on a disk-shaped resonator topology with annular electrodes is fabricated to produce step-up voltages in a compact form factor. The radial vibration characteristics and voltage gain of the bulk transformers under varying impedance loads have been analyzed experimentally, and compared against an electromechanical model of transformer performance. A maximum voltage gain of 7.3 was obtained.