Time resolved emission spectroscopy investigations of pulsed laser ablated plasmas of ZrO2 and Al2O3

Abstract

With the rising trend of synthesizing ultra thin films and/or quantum-confined materials using laser ablation, optimization of deposition parameters plays an essential role in obtaining desired film characteristics. This paper presents the initial step of plasma optimization study by examining temporal distribution of the plasma formation by pulsed laser ablation of materials. The emitted spectra of ZrO2 and Al2O 3 are obtained ∼3mm above the ablated target to derive the ablated plasma characteristics. The plasma temperature is estimated to be at around 2.35 eV, with electron density of 1.14 × 1016 (cm -3). Emission spectra with different gate delay time (40-270 ns) are captured to study the time resolved plume characteristics. Transitory elemental species are identified. © 2006 IOP Publishing Ltd.