Effect of additives on the electrostatic force of alumina electrostatic chucks

Abstract

Ceramic electrostatic chucks made of alumina ceramics were fabricated. Transition metal oxides (1 wt% TiO2, Cr2O3, MnO2, CoO, CuO) were added to control the resistance of the dielectric insulation layer of the chuck. The electrical resistivity and electrostatic force at R.T. -200°C were measured, and it was revealed that the electrostatic force of the chuck depends on the electrical resistance of the ceramic. Among the additives examined, TiO2 was found to be most effective for increasing the adhesion force of the alumina electrostatic chuck.