CVD Diamond Growth Enhanced by a Dynamic Magnetic Field

Abstract

A dynamic magnetic field (DMF) with different angular frequencies (50, 100, and 150 π rad/s) was introduced during diamond growth via hot filament chemical vapor deposition (HFCVD). The effects of the dynamic magnetic field on the growth rate, diamond quality, growth orientation, and deposition uniformity of large-area diamond films were investigated with scanning electron microscopy (SEM), X-ray diffractometry (XRD), and Raman spectroscopy. The correlation between diamond growth and angular frequency was discussed. The results showed that a faster growth rate (about 2.5 times) and higher diamond quality were obtained by increasing the angular frequency of the DMF. A (100) textured polycrystalline diamond film was achieved, and the preferential orientation was found to evolve from (110) to (100), while the expected uniform deposition of a large-area diamond film under DMF was not achieved. The enhancement effect of the DMF was ascribed to the activation of more gas molecules, which participated in CVD diamond growth.