Silicon waveguides produced by wafer bonding

Abstract

X-ray waveguides are successfully produced employing standard silicon technology of UV photolithography and wafer bonding. Contrary to theoretical expectations for similar systems even 100 μm broad guides of less than 80 nm height do not collapse and can be used as one dimensional waveguides to excite single guided modes at typical x-ray energies. © 2005 American Institute of Physics.