Thermophysical properties of SnO2-based transparent conductive films: Effect of dopant species and structure compared with In2O 3-, ZnO-, and TiO2-based films

Abstract

We investigate the effect of dopant species and structure on the thermal conductivity of Sb-doped Sn2 (ATO) and Ta-doped Sn2 (TTO) films and compare the results with those of In2O3-, ZnO-, and TiO2-based transparent conductive films. The thermal conductivities (λ) of polycrystalline ATO and TTO films are 4.4-4.9 and 4.7 W m-1 K-1, respectively. The thermal conductivities via phonons (kph) are almost identical for both dopant species (Sb and Ta): 4.3 and 4.5Wm-1 K-1 for Sb and Ta, respectively, on average. These results for λph are larger than that for Sn-doped In2O3 films (3.8 W m-1 K-1) and considerably larger than that for amorphous ATO films (1.0 W m-1 K-1). These facts lead us to conclude that the base-material species (Sn2 or In2O3) and structure (polycrystalline or amorphous) affect the thermophysical properties of ATO and TTO much more than the dopant species. Copyright © 2014 Materials Research Society.