Fundamentals and Applications of Ellipsometry

Abstract

Ellipsometry is widely used as a powerful tool in the research of nano-science and the thin film engineering. The thickness of the film of sub-nm order can be measured by ellipsometry with high accuracy along with its refractive index. Ellipsometry is a non-destructive method and is ambient free in the measurement. Nowadays, its applications range over a variety of field. This article describes an introduction to ellipsometry with some its applications. And the perspective of ellipsometry is also briefly summarized.