A model for "cold" laser ablation of green state ceramic materials

Abstract

This paper reports calculations of predicted values of the key process parameters associated with "cold" laser ablation of ceramic materials in the green state. A model for material removal of composite organic/ceramic materials is proposed and verified experimentally by laser ablation measurements and ultrafast videography. An energy balance approach is used with the model to calculate values of threshold fluence, material removal rate and particle escape velocity, which are seen to be in good agreement with experimental results. Suggested values for optimised laser machining of LTCC are proposed. © 2008 Springer-Verlag.