Conference Proceedings

ALD, ALE and 2D Materials: Atomic scale processing for optoelectronics applications

Optics InfoBase Conference Papers (2017) Part F83-ACPC 2017
DOI: 10.1364/ACPC.2017.S3J.6
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Abstract

Many applications are seeing a trend towards miniaturization and utilization of nanoscale effects. In this presentation atomic-scale processing techniques offered by Oxford Instruments will be discussed and possible benefits for optoelectronics applications are highlighted.

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Knoops, H. (2017). ALD, ALE and 2D Materials: Atomic scale processing for optoelectronics applications. In Optics InfoBase Conference Papers (Vol. Part F83-ACPC 2017). Optica Publishing Group (formerly OSA). https://doi.org/10.1364/ACPC.2017.S3J.6

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