Journal Article

Summary Abstract: Ion-enhanced gas-surface chemistry

  • Coburn J
Journal of Vacuum Science and Technology (1982) 21(2) 557-558
DOI: 10.1116/1.571761
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Coburn, J. W. (1982). Summary Abstract: Ion-enhanced gas-surface chemistry. Journal of Vacuum Science and Technology, 21(2), 557–558. https://doi.org/10.1116/1.571761

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