Abstract
Using a scanning microscope with a zone plate, X-ray fluorescence micro-tomography was investigated at SPring-8 BL20XU. A 120 nm-thick zinc layer could be resolved in the reconstructed section image. A frozen phytoplankton and a iron impurity of a diamond could be also reconstructed. X-ray fluorescence laminography was tested at SPring-8 BL47XU. A tantalum line pattern of 3 μm line width could be reconstructed. © 2009 IOP Publishing Ltd.
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CITATION STYLE
Watanabe, N., Hoshino, M., Yamamoto, K., Aoki, S., Takeuchi, A., & Suzuki, Y. (2009). X-ray fluorescence micro-tomography and laminography using an X-ray scanning microscope. In Journal of Physics: Conference Series (Vol. 186). https://doi.org/10.1088/1742-6596/186/1/012022
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