EUV pellicle technology for high volume wafer production

Lin, Y.-Y., Tsai, P.-H., Elphick, K., Hsu, C.-H., Shieh, K.-L., Chang, F. H., … Wen, V. C. W. (2023). EUV pellicle technology for high volume wafer production (p. 44). SPIE-Intl Soc Optical Eng. https://doi.org/10.1117/12.2688127