A comparative study on virtual machine model for testing semi-conductor production equipment

Abstract

Background/Objectives: Recently, as the semi-conductor industry makes rapid progress, semi-conductor production equipment is developed and manufactured as an efficient and flexible system. However, because the supply does not meet the demand and the number of requests for bringing forward the deadline for manufacturing semi-conductor equipment is increasing rapidly, the problem with this is that manufactured products are not tested properly. In this paper, virtual equipment that can be used for testing programs was manufactured to bring solutions to the following cases: the case where it is difficult to conduct a test because the manufacturing of production equipment is more delayed than the manufacturing of the program for testing production equipment, and the case where it is required to remotely test the equipment installed on site. Methods/Statistical analysis: In the process of manufacturing the program for testing conductor equipment, variables capable of operating IO and motor compatible with virtual equipment were defined, and shared memory was used to create a connection with virtual equipment so that the equipment program can be used to operate the virtual equipment. In addition, TCP/IP Server and Client were used to implement a client server to create an environment identical to reality. Findings: When it comes to semi-conductor equipment, its program plays a very significant role and is one of the items that require frequent improvements. In the early stage of equipment development, it is possible to test the program instead of the actual equipment. However, in the case where improvements such as modified server communication and operation are made, without the actual equipment to be measured, it is difficult to run the verification process. In particular, in the case where it is impossible to directly verify the equipment because the equipment is at a distance, virtual equipment can be utilized to verify operation, and virtual equipment can play an important role in manufacturing or verifying operation algorithms required for manufacturing reliable equipment. In addition, since virtual equipment contains a built-in server, it can be utilized to not only implement communication with the server, but also verify the program in an environment almost identical to the environment in which the actual equipment operates. As a result of implementing a simulation model and operating a clamp cylinder on the IO screen, it was able to confirm the operating status and sensor status of the involved cylinder.