Abstract
This article presents simulation and experimental results on the generation of X-rays on a MEMS target. The influence of the target material, target thickness, and electron beam energy on the obtained intensities and radiation spectra has been investigated. This work is a major step towards elaborating the first completely MEMS X-ray source.
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CITATION STYLE
Urbanski, P., Bialas, M., Krysztof, M., & Grzebyk, T. (2022). Mems X-Ray Source: Electron-Radiation Conversion. In 2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2022 (pp. 42–45). Institute of Electrical and Electronics Engineers Inc. https://doi.org/10.1109/PowerMEMS56853.2022.10007561
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