A novel valve-less piezoelectric micropump generating recirculating flow

Abstract

Microfluidic devices or systems to generate recirculating flow are increasingly utilized in the fields of chemistry, biomedicine, biology, with bottlenecks in integration and miniaturization needed a breakthrough. Here, a concept for a highly integrated valve-less piezoelectric micropump generating recirculating flow (VPMGRF) is proposed, simultaneously realizing innovation in theory and method. Based on fluid inertiaand energy dissipation of vortexes, a novel double-loop tube was designed to achieve fluid flow in different directions along various paths, with the flow characteristics at different cross-sectional areas explored through computational fluid dynamics (CFD). Afterwards, as valve bodies, the double-loop tubes were connected with a piezoelectric-actuated chamber to constitute the VPMGRF, which was followed by establishing a theoretical model of the vibration, fluid dynamics, and net flow rate. Eventually, experimental results showed that VPMGRFs could generate internal recirculating flow and had a pump effect. The maximum net flow rate reached 5.19 mL/min at 8 Hz, corresponding to a vibrator amplitude of 35 μm and an output pressure amplitude of 4.27 kPa. Furthermore, the larger the characteristic length of the cross section, the greater the amplitude of the vibrators, the larger the amplitude of output pressure, and the slower the flow rate.