KAJIAN SIFAT OPTIK FILM TIPIS BST DIDADAH NIOBIUM DAN TANTALUM

Abstract

In this research thin films of Barium Strontium Titanate (BST) has been synthesis with different compositions Ba 0,5 Sr 0,5 TiO 3 and Ba 0,25 Sr 0,75 TiO 3 which doped by Nb 2 O 5 (Niobium) and Ta 2 O 5 (Tantalum) on Si (100) type-p substrate. Thin films were produced by chemical solution deposition technique (CSD) and spin coating technique with annealing temperature at 850 o C, 900 o C dan 950 o C. Rotation velocity at 3000 rpm and time of rotation is 30 seconds. Characterization of Films is optic Characterization (absorbance ana reflectance). From the Characterizations were obtained BNST thin film with 5% doping and anneling temperature at 850 0 C as photodiode light sensor which applied in electronic circuit.