Vibrational micro-energy harvesters utilizing Nb-doped Pb(Zr,Ti)O3 films on stainless steel substrates

Abstract

This work presents the micromachined energy harvesters using Nb-doped Pb(Zr,Ti)O3 (PNZT) films grown directly on the stainless steel substrates (SUS430). Piezoelectric materials on metallic substrates have been attracted to practical and robust energy harvesters. Nb-doped PZT films with (001)-preferred orientation grown on SUS substrates provided excellent properties for energy harvesting - high piezoelectric coefficient (e 31 = -10.6 C/m2) and low dielectric permittivity (ϵr = 373). The PNZT-based micro-energy harvester comprising a cantilever of 1.7 mm× 5 mm × 0.05 mm and a proof mass of 3 mm× 5 mm × 47 mm achieved the normalized power density (NPD) of 2.87 mW.g-2.cm-3. It is the highest performance among the published SUS-based energy harvesters, being closer to the best Si- based energy harvesters.